发明名称 Flange assembly of an optical system
摘要 A flange assembly ( 1 ) of an optical system has a first flange ( 2 ), a compensation element ( 4 ) and a second flange ( 2 '). The flanges ( 2, 2 ') and the compensation element ( 4 ) are substantially axially symmetric both flanges ( 2, 2 ') being suitable for being connected to other components ( 10, 11 ) of the optical system in a non-destructive, non-positive axially separable fashion. The two flanges ( 2, 2 ') consist of different materials with different coefficients of linear thermal expansion. The compensation element ( 4 ) is radially soft, but connects the two flanges ( 2, 2 ') rigidly in their relative spatial position.
申请公布号 US2005099704(A1) 申请公布日期 2005.05.12
申请号 US20040985450 申请日期 2004.11.10
申请人 RAU JOHANNES;MAHLMANN MARTIN 发明人 RAU JOHANNES;MAHLMANN MARTIN
分类号 G02B7/00;G02B7/02;G03F7/20;H01L21/027;(IPC1-7):G02B7/02 主分类号 G02B7/00
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