ULTRAPURE WATER MAKING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an ultrapure water making apparatus constituted so as to effectively remove impurities eluted from a membrane degassing means while keeping the dissolved oxygen reducing effect by the membrane degassing means to stably supply ultrapure water of high water quality.

SOLUTION: In the sub-system of the ultrapure water making apparatus for refining primary pure water to obtain ultrapure water, an ion adsorbing membrane having an ion exchange function for removing the component eluted from the membrane degassing means is arranged on the rear stage of a non-regeneration type mixed bed ion exchange means and the membrane degassing means.

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