| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for generating saturated gas, which is constituted so that the water put in a vessel is heated by a heating means, a gas is then put in the vessel, dispersed in the hot water and brought into contact with the hot water and the hot water-contacted gas is withdrawn from the vessel as the gas containing saturated steam of the objective temperature, thereby the saturated gas having a precise dew point can be obtained. SOLUTION: This apparatus for generating saturated air is provided with a saturation tank 1, an intermediate mesh 4 arranged at the vertically intermediate position of the saturation tank 1, a second heating unit 5 and a heating unit 2 arranged respectively in the upper and lower sections 1a and 1b and a water replenishing pipe 13. The water in the lower section 1b is heated by the heating unit 2 to the temperature higher than the temperature t<SB>2</SB>of the objective saturated air which is to heated by the second heating unit 5. COPYRIGHT: (C)2005,JPO&NCIPI
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