| 摘要 |
An aspect of the present invention includes a method for homogenizing a beam of electromagnetic radiation. Said beam of electromagnetic radiation is impinged onto a first array of deflecting elements. Said beam of electromagnetic radiation is dispersed into a numerous of spatially separated beamlets by said first array of deflecting elements. Said deflected beamlets are impinged onto a second array of deflecting elements. Said beamlets are superimposed at a target plane whereby a radiation beam is formed having a homogenized spatial intensity distribution. The invention also relates to an apparatus for homogenizing a beam of electromagnetic radiation.
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