HEAT TREATMENT APPARATUS

摘要

The substrate temperature measuring instrument of a device for heating a substrate with light application is composed of a thermocouple and a covering member which covers the thermocouple. The part of the covering member which covers a temperature measuring part is made of a high heat- conductivity material, and the part other than the part made of the high heat-conductivity material is made of high light reflectivity material. The temperature of the substrate heated by light application can be measured accurately without influence of the heating light, without contamination of the substrate regardless of the film thickness construction of the substrate.