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发明名称
摘要
申请公布号
JP3645511(B2)
申请公布日期
2005.05.11
申请号
JP20010311540
申请日期
2001.10.09
申请人
发明人
分类号
H01L21/56;H01L21/60;H01L23/498;(IPC1-7):H01L21/60
主分类号
H01L21/56
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