ARRANGEMENT FOR THE PRODUCTION OF PHOTOMASKS,申请号EP20030762666-传众专利搜索

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发明名称	ARRANGEMENT FOR THE PRODUCTION OF PHOTOMASKS
摘要
申请公布号	EP1529245(A1)	申请公布日期	2005.05.11
申请号	EP20030762666	申请日期	2003.07.09
申请人	CARL ZEISS SMS GMBH;CARL ZEISS NTS GMBH	发明人	ENGEL, THOMAS;HARNISCH, WOLFGANG;HOFFROGGE, PETER;ZIBOLD, AXEL
分类号	G03F1/00;H01L21/027;(IPC1-7):G03F1/00;G03F7/20	主分类号	G03F1/00
代理机构		代理人
主权项
地址

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