| 摘要 |
PURPOSE: To provide a laser beam machine which has an economic advantage by preventing damage to an objective lens for observation. CONSTITUTION: The flaw of a sample 3 is detected by positioning an objective lens 6 for observation on the optical axis 14 through the operation of a revolver 5 and using a co-focus laser microscope through this objective lens 6 for observation. Upon detection of the flaws on the sample 3, an objective lens 7 for laser machining is positioned instead on the optical axis 14 through the operation of the revolver 5; and marking is performed by having the sample 3 irradiated with a laser beam from a laser beam source unit 22 through this objective lens 7 for laser machining. |
