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经营范围
发明名称
A METHOD OF FORMING MICRO PATTERN
摘要
申请公布号
KR20050043509(A)
申请公布日期
2005.05.11
申请号
KR20030078426
申请日期
2003.11.06
申请人
LG ELECTRONICS INC.
发明人
AHN, SEH WON;LEE, KI DONG;LEE, SUNG EUN
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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