УСТРОЙСТВО ДЛЯ ВЫПОЛНЕНИЯ ТРЕХМЕРНОЙ СТРУКТУРЫ В ПОДЛОЖКЕ

摘要

A device and a method for processing a substrate, wherein a flexible force absorbing means is provide in at least a part of a tool plan and/or a reaction plan, so as to locally absorbing the forces applied by the planes. The flexible force absorbing mean having spring-like properties such that it is adapted to be elastically deformed when the tool plan and the reaction plan are pressed against each other.