发明名称 |
Method for eliminating process byproduct during fabrication of liquid crystal display |
摘要 |
A fabricating method of a liquid crystal display includes the steps of inserting a first substrate into a chamber to perform a dry etching process, removing the first substrate from the chamber after completion of the dry etching process, inserting a dummy substrate into the chamber, injecting inert gas into the chamber to eliminate a process byproduct and a remaining gas, taking the dummy substrate out from the chamber, and inserting a second substrate into the chamber having the process byproduct and the remaining gas removed, to perform an ashing process.
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申请公布号 |
US6890856(B2) |
申请公布日期 |
2005.05.10 |
申请号 |
US20030653909 |
申请日期 |
2003.09.04 |
申请人 |
LG. PHILIPS LCD CO., LTD. |
发明人 |
KIM HWAN;PARK KI CHOON;JUNG YOUNG SUP;YANG CHANG KUK |
分类号 |
G02F1/13;G02F1/1362;H01L21/00;(IPC1-7):H01L21/302 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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