IMPROVED ANTIREFLECTIVE COATINGS,申请号WO2004EP10107-传众专利搜索

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发明名称	IMPROVED ANTIREFLECTIVE COATINGS
摘要	<p>The present invention relates to bottom antireflective coatings.</p>
申请公布号	WO2005040923(A1)	申请公布日期	2005.05.06
申请号	WO2004EP10107	申请日期	2004.09.10
申请人	CLARIANT INTERNATIONAL LTD	发明人	TOUKY, MEDHAT, A.;OBERLANDER, JOSEPH, E.
分类号	G03F7/09;(IPC1-7):G03F7/09	主分类号	G03F7/09
代理机构		代理人
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