发明名称 SURFACE TREATMENT METHOD AND DEVICE
摘要 <p>A high-quality surface treatment is achieved with a simple and low cost structure that enables a uniform gas supply on to a base material. A surface treatment of a base material (12) is made by supplying a surface treatment gas toward the surface of the base material (12) that is being transported in a predetermined direction. Means for supplying the surface treatment gas is constructed such that a facing member (20) is positioned away from the surface of the base material (12) or from the base material, the outer peripheral surface of a rotating body (24) having a hollow-cylindrical outer peripheral surface is faced, with a gap (23), to the facing material (20), and the rotating body is rotated about an axis substantially perpendicular to the transportation direction of the base material (12). The rotation causes the surface treatment gas to be enwound on the outer peripheral surface of the rotating body (24) and lead to the gap (23), and the gas is sent out from the gap (23) to the surface of the base material (12).</p>
申请公布号 WO2005040454(A1) 申请公布日期 2005.05.06
申请号 WO2004JP16288 申请日期 2004.10.27
申请人 KABUSHIKI KAISHA KOBE SEIKO SHO;ASAHI GLASS CO., LTD.;HAYASHI, KAZUSHI;KUGIMIYA, TOSHIHIRO;KOBORI, TAKASHI;EBISAWA, JUNICHI;SATO, KAZUO;YOSHIKAWA, YUKIO 发明人 HAYASHI, KAZUSHI;KUGIMIYA, TOSHIHIRO;KOBORI, TAKASHI;EBISAWA, JUNICHI;SATO, KAZUO;YOSHIKAWA, YUKIO
分类号 C23C16/44;C23C16/455;H01J37/32;H01L21/00;H01L21/316;(IPC1-7):C23C16/455;C23F4/00;H01L21/306;H01L21/31 主分类号 C23C16/44
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