发明名称 SUBSTRATE CARRIER
摘要 A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.
申请公布号 WO2005041267(A2) 申请公布日期 2005.05.06
申请号 WO2004US35313 申请日期 2004.10.25
申请人 ENTEGRIS, INC.;BURNS, JOHN;FULLER, MATTHEW, A.;KING, JEFFERY, J.;FORBES, MARTIN. L.;SMITH, MARK, V.;ZABKA, MICHAEL 发明人 BURNS, JOHN;FULLER, MATTHEW, A.;KING, JEFFERY, J.;FORBES, MARTIN. L.;SMITH, MARK, V.;ZABKA, MICHAEL
分类号 B65D85/00;H01L 主分类号 B65D85/00
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