SHOWER HEAD AND FILM-FORMING DEVICE USING THE SAME

摘要

A shower head for supplying a raw material gas and a support gas for film formation into the treatment container of a film-forming device, comprising a shower head body with a gas injection surface (8). A first diffusion chamber (60) receiving and diffusing the raw material gas and second diffusion chambers (62) receiving and diffusing the support gas are formed in the shower head body. Raw material gas injection ports (10A) communicating with the first diffusion chamber and first support gas injection ports (10B) communicating with the second diffusion chambers are formed in the gas injection surface. Each of the first support gas injection ports (10B) is formed in a ring shape surrounding each of the raw material gas injection ports (10A) in proximity to each other.