发明名称 |
Direct exposure system and user interface |
摘要 |
A direct exposure system comprises: a data mask that is a data object including drawing data; and a control mask that is a data object including at least one logical layer in which information about exposure conditions applied according to regions on a substrate is specified, and performs a direct exposure process using integrated data generated by combining the data mask with the control mask.
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申请公布号 |
US2005094120(A1) |
申请公布日期 |
2005.05.05 |
申请号 |
US20040974327 |
申请日期 |
2004.10.27 |
申请人 |
SEKIGAWA KAZUNARI;KOYAMA TOSHINORI;KOBAYASHI KAZUTAKA;AKAGAWA MASATOSHI |
发明人 |
SEKIGAWA KAZUNARI;KOYAMA TOSHINORI;KOBAYASHI KAZUTAKA;AKAGAWA MASATOSHI |
分类号 |
G03F7/20;G03B27/54;H01L21/027;H05K3/00;(IPC1-7):G03B27/54 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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