| 发明名称 |
Apparatus and method for proof of outgassing products |
| 摘要 |
Outgassing products, which are formed during the exposure of photoresist systems by laser irradiation, are adsorbed on a proof plate for further analysis.
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| 申请公布号 |
US2005092936(A1) |
申请公布日期 |
2005.05.05 |
| 申请号 |
US20040974829 |
申请日期 |
2004.10.28 |
| 申请人 |
HERBST WALTRAUD;KRAGLER KARL;SEBALD MICHAEL |
发明人 |
HERBST WALTRAUD;KRAGLER KARL;SEBALD MICHAEL |
| 分类号 |
G01N1/00;G01N1/02;G01N1/22;G01N1/40;G03F7/039;G03F7/20;(IPC1-7):A61N5/00;G21G5/00 |
主分类号 |
G01N1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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