| 发明名称 |
Stage base, stage apparatus, exposure apparatus and device manufacturing method |
| 摘要 |
A stage base includes a plate which supports a stage, a component which is arranged on the stage and has a cooling unit, and a coolant channel arranged to extend through the plate into the component.
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| 申请公布号 |
US2005094124(A1) |
申请公布日期 |
2005.05.05 |
| 申请号 |
US20040943010 |
申请日期 |
2004.09.17 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
ONO KAZUYUKI |
| 分类号 |
F24F3/00;G01J1/00;G01N21/00;G01N23/00;G03B27/58;G03F7/20;H01L21/027;H01L21/68;(IPC1-7):G03B27/58 |
主分类号 |
F24F3/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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