| 摘要 |
Differential signals and sum signals are extracted from a detection signal of passing light detected when a light beam emitted to an analysis optical disc passes through a particle on the disc. Presence of the particle is decided based on the differential signals, effectiveness of counting particles is decided based on the sum signals, and the decision results are stored. The stored decision results are scanned by using a scanning window corresponding to a minimum size of measured objects, particles having the minimum size are detected, and the number of detected particles is stored. Subsequently, the stored decision results are scanned using a scanning window corresponding to a size larger by one scan than the maximum size of the measured objects, particles having a size larger by one scan than the maximum size are detected, and the number of detected particles is stored. Finally, the number of detected particles within a certain size range is determined based on a difference between the stored numbers of detected particles.
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