| 摘要 |
When abrasion or fracture of a needle portion of a manipulator provided in an FIB device is confirmed in a microscope image, a lost structure of the needle portion is repaired by CVD using an FIB, or when it is confirmed in a microscope image that the needle portion of the manipulator provided in the FIB device is in a bent state, the portion is cut by etching using an FIB to form a normal structure at a tip of the cut portion with the CVD using an FIB to repair the needle portion. The invention is also applied to tweezers having two needles held to be used.
|
