发明名称 Transistor of semiconductor device and method for manufacturing the same
摘要 Transistor of semiconductor device and method for manufacturing the same are disclosed. The transistor comprises a channel region formed on a sidewall of a silicon fin extruding above a device isolation region. The silicon fin serves as an active region and is shorter in length so as to be spaced apart from an adjacent gate electrode. The width of the channel region is determined by the height of the silicon fin. The source/drain region of the transistor is disposed at an upper surface and the sidewall of the silicon fin to increase the contact region.
申请公布号 US2005095793(A1) 申请公布日期 2005.05.05
申请号 US20040878328 申请日期 2004.06.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE SANG D.
分类号 H01L21/76;H01L21/336;H01L21/762;H01L21/8234;H01L21/8242;H01L27/08;H01L27/088;H01L27/108;H01L29/78;H01L29/786;(IPC1-7):H01L21/824 主分类号 H01L21/76
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