发明名称 Bond pad scheme for Cu process
摘要 A novel method of forming a bond pad of a semiconductor device and a novel bond pad structure. Two passivation layers are used to form bond pads of a semiconductor device. A portion of the second passivation layer resides between adjacent bond pads, preventing shorting of the bond pads during subsequent wire bonding processes or flip-chip packaging processes.
申请公布号 US2005095836(A1) 申请公布日期 2005.05.05
申请号 US20040999464 申请日期 2004.11.29
申请人 LAI CHIA-HUNG;LIN JIUNN-JYI;CHANG TZONG-SHENG;CAO MIN;TSENG HUAN-CHI;LEE YU-HUA;YANG CHIN-TIEN 发明人 LAI CHIA-HUNG;LIN JIUNN-JYI;CHANG TZONG-SHENG;CAO MIN;TSENG HUAN-CHI;LEE YU-HUA;YANG CHIN-TIEN
分类号 H01L21/28;H01L21/44;H01L21/60;H01L21/768;H01L23/48;H01L23/485;H01L23/52;H01L29/40;(IPC1-7):H01L21/44 主分类号 H01L21/28
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