发明名称 |
CALIBRATION WAFER AND KIT |
摘要 |
A calibration wafer which is suitable for calibrating alignment of a transfer robot blade with respect to wafers in a loadlock chamber or input shuttle. The calibration wafer includes a circular wafer body on which is provided a pair of spaced-apart blade alignment lines which are used to properly align the transfer robot blade. The invention further includes a calibration kit for calibrating alignment of a polishing head with a pedestal, including a base plate for placement on the pedestal; a calibration plate for placement on the base plate; and a calibration circle provided on the calibration plate for aligning the polishing head with the pedestal.
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申请公布号 |
US2005091863(A1) |
申请公布日期 |
2005.05.05 |
申请号 |
US20030701805 |
申请日期 |
2003.11.04 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD. |
发明人 |
CHUANG CHIH-NAN;HU TIEN-CHEN;LIN TRO-HSU;CHANG CHENG-FANG |
分类号 |
B24B37/04;B24B47/22;G01D21/00;H01L21/302;H01L21/66;H01L21/68;H01L23/544;(IPC1-7):G01D21/00 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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