| 摘要 |
A fluid injector and method of manufacturing the same. The fluid injector comprises a base, a first through hole, a fluid actuator, a passivation layer, and a thick hydrophobic film. The base includes a chamber and a surface. The first through hole communicates with the chamber, and is disposed in the base. The fluid actuator is disposed on the surface near the first through hole, and is located outside the chamber. The passivation layer is disposed on the surface. The thick hydrophobic film defines a second through hole, and is disposed on the passivation layer outside the chamber. The second through hole communicates with the first through hole.
|
