| 摘要 |
A trap device (18) for removing species from a gas stream drawn from an enclosure by a vacuum pump is described, the device (18) comprising a casing having an inlet (16) for receiving the gas stream, an outlet (20) for exhausting the gas stream from the casing, and first and second chambers (136, 138) each for receiving the gas stream from the inlet and conveying the gas stream to the outlet; means (170, 174) for selectively diverting the gas stream from the inlet to a selected one of the chambers; a first plurality of cartridges (32) each being removably insertable into the casing to provide a plurality of flow passages for gas passing through the first chamber; and a second plurality of cartridges (132) each being removably insertable into the casing to provide a plurality of flow passages for gas passing through the second chamber, each flow passage extending between an inlet and an outlet of a respective cartridge, each cartridge housing means for removing species from the gas passing therethrough as solid material collecting within the cartridge. |
