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发明名称
SCATTER-FREE UV OPTICAL FLUORIDE CRYSTAL ELEMENTS FOR BELOW 200 NM LASER LITHOGRAPHY AND METHODS
摘要
申请公布号
EP1527362(A1)
申请公布日期
2005.05.04
申请号
EP20030784803
申请日期
2003.07.24
申请人
CORNING INCORPORATED
发明人
PRICE, MICHAEL, W.;RODRIGUEZ, GAIL, A.
分类号
G02B1/02;C30B11/00;C30B29/12;(IPC1-7):G02B1/02
主分类号
G02B1/02
代理机构
代理人
主权项
地址
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