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发明名称
CHEMICAL MECHANICAL POLISHER
摘要
申请公布号
KR20050041422(A)
申请公布日期
2005.05.04
申请号
KR20030076589
申请日期
2003.10.31
申请人
MAGNACHIP SEMICONDUCTOR, LTD.
发明人
YOON, IL YOUNG
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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