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经营范围
发明名称
DIFFUSION SYSTEM
摘要
申请公布号
KR20050040969(A)
申请公布日期
2005.05.04
申请号
KR20030075814
申请日期
2003.10.29
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHOI, BYOUNG LYONG;KIM, JUN YOUNG;LEE, EUN KYUNG
分类号
H01L21/223;C23C8/06;C23C16/44;C23C16/448;C23C16/452;C23C16/54;C30B31/06;C30B31/10;C30B31/16;C30B35/00;(IPC1-7):H01L21/22
主分类号
H01L21/223
代理机构
代理人
主权项
地址
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