OPTICAL REPRODUCTION SYSTEM, IN PARTICULAR CATADIOPTRIC REDUCTION LENS

摘要

The invention relates to an optical reproduction system, which can be configured for example as a catadioptric projection lens. Said system comprises an optical axis, a first deflection mirror, which is tilted in relation to the optical axis at a first tilt angle and a second deflection mirror, which is tilted in relation to the optical axis at a second tilt angle. One of the deflection mirrors has a ratio Rsp of the reflection coefficient Rs for s-polarised light to the reflection coefficient R p for p-polarised light, in an incidence angle range that includes the tilt angle, of greater than one, whereas the corresponding ratio for the other deflection mirror is less than one. The deflection mirrors thus ensure that the polarisation-dependent influence of the traversing light remains minimal.