Modular injector and exhaust assembly,申请号EP20020254963-传众专利搜索

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发明名称	Modular injector and exhaust assembly
摘要
申请公布号	EP1283279(B1)	申请公布日期	2005.05.04
申请号	EP20020254963	申请日期	2002.07.15
申请人	ASML US, INC.	发明人	DE DONTNEY, JAY BRIAN;MATTHIESEN, RICHARD;KURITA, SAMUEL
分类号	C23C16/44;C23C16/455;H01L21/205;(IPC1-7):C23C16/455	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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