发明名称 |
SYSTEM AND METHOD OF OPERATION OF AN EMBEDDED SYSTEM FOR A DIGITAL CAPACITANCE DIAPHRAGM GAUGE |
摘要 |
Systems and methods for digitally controlling sensors. In one embodiment, a digital controller for a capacitance diaphragm gauge is embedded in a digital signal processor (DSP). The controller receives digitized input from a sensor AFE via a variable gain module, a zero offset module and an analog-to-digital converter. The controller automatically calibrates the received input by adjusting the variable gain and zero offset modules. The controller also monitors and adjusts a heater assembly to maintain an appropriate temperature at the sensor. The controller utilizes a kernel module that allocates processing resources to the various tasks of a gauge controller module. The kernel module repetitively executes iterations of a loop, wherein in each iteration, all of a set of high priority tasks are performed and one of a set of lower priority tasks are performed. The controller module thereby provides sensor measurement output at precisely periodic intervals, while performing ancillary functions as well. |
申请公布号 |
EP1527327(A2) |
申请公布日期 |
2005.05.04 |
申请号 |
EP20030731440 |
申请日期 |
2003.05.29 |
申请人 |
ENTEGRIS, INC. |
发明人 |
ALBERT, DAVID, M.;ARRANT, EDWIN, K.;EDWARDS, MARVIN, B. |
分类号 |
G01L9/00;G01D3/02;G01D18/00;G01L9/12;G01L19/02;G01L19/04;G01L27/00;(IPC1-7):G01L9/12 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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