Light sensitive compsn. e.g. for resist film - comprising an alkali soluble polymer with an alkali-soluble gp. protected by an acid-labile gp., a photogenerator of acid and a miscibility improver

摘要

A light sensitive compsn. comprises (1) (a) a polymer obtd. by protecting the alkali-soluble gp. of an alkali soluble polymer with an acid-labile gp., (b) a cpd. (I) which releases an acid upon irradiation with light; and (c) at least one cpd. selected from imidazole cpds., alanine cpds., adenine cpds., adenosine cpds., and quat. ammonium salt cpds. which increase the miscibility in a resist film. Other claimed light-sensitive compsns. contain (2) (a) a polymer obtd. by protecting the alkali-soluble gp. of an alkali soluble polymer with an acid-labile gp., (b) a cpd. (I) which releases an acid upon irradiation with light; and (c) a phenol cpd.; and (3) (a) a polymer obtd. by protecting the alkali-soluble gp. of an alkali soluble polymer with an acid-labile gp., (b) a cpd. (I) which releases an acid upon irradiation with light; (c) at least one cpd. selected from imidazole cpds., alanine cpds., adenine cpds., adenosine cpds., and quat. ammonium salt cpds. which increase the miscibility in a resist film and (d) a phenol cpd. Also claimed is a method of producing a structure.