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发明名称
THE FORMATION METHOD OF PD CATALYST ON OXYDIZED SILICON WAFER
摘要
申请公布号
KR20050041242(A)
申请公布日期
2005.05.04
申请号
KR20030076349
申请日期
2003.10.30
申请人
YEUNGNAM EDUCATIONAL FOUNDATION
发明人
CHOI, SOON DON;JANG, HUN SIK;LEE, SANG KI;MIN, BONG KI;SIHN, HYUN JUN
分类号
H01L21/288;(IPC1-7):H01L21/288
主分类号
H01L21/288
代理机构
代理人
主权项
地址
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