发明名称 Active/adaptive actuator design of an adaptive optic mirror
摘要 A method and tool to smooth surface contours uses a fixed back plate mounted at a known distance to an actuator holding plate. Each of the actuators is mounted in said actuation holding plate by a support collar threaded into said actuator holding plate. Threaded with said support collar is an actuator holder with rigidly holds an actuator. A differential threaded adjustment device is then inserted through said fixed back plate and connected to say support collar and actuator holder so that each can be moved independently of the other. The actuator is made of two piezoelectric plates connected in parallel and separated by a silicon rubber o-ring.
申请公布号 US6886951(B2) 申请公布日期 2005.05.03
申请号 US20030656775 申请日期 2003.09.04
申请人 BENNETT OPTICAL RESEARCH, INC. 发明人 BENNETT HAROLD EARL;WESTFALL JACK D.;TAYLOR ROBERT A.;SHAFFER JOSEPH JASPERSON;MCFADDEN EARL LA FAYETTE
分类号 G02B26/06;G02B26/08;(IPC1-7):G02B7/185;G02B7/188;H01L41/053 主分类号 G02B26/06
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