| 摘要 |
The invention is directed to a touch probing device for inspecting an object which includes a fixed part, movable part coupled to and movable with respect to the fixed part for measuring the motion between the fixed and the movable parts, and a contact means coupled to the movable part for contacting a surface of the object. The contact means is preferably coupled to the movable part via a shock absorber. Alternatively, or in addition weight compensating means are provided for compensating the weight of the movable part. The weight compensating means preferably uses a magnetic field for compensating the weight of the movable part.
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