Automatic test system for an analog micromirror device

摘要

An automatic tester for an analog micromirror device includes a computer having an ADC and DAC connected to its peripheral bus. A micromirror device under test is mounted on a black box containing a light source such as a laser and a position sensitive device. The light beam is reflected by the micromirror device onto the position sensitive device so that the deflection of the mirror in two axes can be measured. The output of the position sensitive device is amplified and coupled to the ADC via a tester board. The computer can test the micromirror device to detect mechanical failure and to measure the resonant frequency and Q of the driving coils, and SNR of the internal package feedback which measures the position of the mirror.