| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a slit nozzle which makes it less liable to easily drop the flow rate of a coating liquid at both ends. <P>SOLUTION: The slit nozzle 1 is composed of right and left halves 2 and 3. The mating face of the half 2 is made flat and a manifold 4 extending in the longitudinal direction is formed in the center of the other half 3. The section 5 superior to the manifold 4 is used as the mating face with the half 2. The section 6 inferior to the manifold 4 is recessed by grinding the inferior section 6 more than the superior section 5, so that a gap is formed between the half 3 and the mating face of the half 2. The gap is made to have the same size as the width W of an outlet 7 of the slit nozzle. Furthermore, both the ends of the slit nozzle 1 are sealed liquid-tight with side plates 8 and 9. The side plates 8 and 9 are made of a water-repellent material like a resin, or the reverse faces of the side plates 8 and 9 with which the halves 2 and 3 are mated are coated with the water-repellent material. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
