发明名称 |
Extended length metal line for improved ESD performance |
摘要 |
A multi-level metal interconnect structure and method for forming the same for improving a resistance of CMOS transistors to electrostatic discharge (ESD) transient events is disclosed. A semiconductor device including at least one NMOS transistor electrically connected along at least one circuit pathway to an input/output signal source and a reference voltage potential; and, electrically connecting at least the input/output signal source to the at least one NMOS transistor with a metal interconnect line extended in length by compacting at least a portion of the metal interconnect line length portion into a serpentine shape within a predetermined volume of the semiconductor device.
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申请公布号 |
US6888248(B2) |
申请公布日期 |
2005.05.03 |
申请号 |
US20030401090 |
申请日期 |
2003.03.26 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD |
发明人 |
CHEN SHUI-HUNG;LEE JIAN-HSING;SHIH JIAW-REN |
分类号 |
H01L23/60;H01L27/02;(IPC1-7):H01L23/48 |
主分类号 |
H01L23/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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