发明名称 Extended length metal line for improved ESD performance
摘要 A multi-level metal interconnect structure and method for forming the same for improving a resistance of CMOS transistors to electrostatic discharge (ESD) transient events is disclosed. A semiconductor device including at least one NMOS transistor electrically connected along at least one circuit pathway to an input/output signal source and a reference voltage potential; and, electrically connecting at least the input/output signal source to the at least one NMOS transistor with a metal interconnect line extended in length by compacting at least a portion of the metal interconnect line length portion into a serpentine shape within a predetermined volume of the semiconductor device.
申请公布号 US6888248(B2) 申请公布日期 2005.05.03
申请号 US20030401090 申请日期 2003.03.26
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD 发明人 CHEN SHUI-HUNG;LEE JIAN-HSING;SHIH JIAW-REN
分类号 H01L23/60;H01L27/02;(IPC1-7):H01L23/48 主分类号 H01L23/60
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