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发明名称
浸没式微影系统及对具有一光感材料层形成于其上之半导体结构照光的方法
摘要
本发明揭露一浸没式微影系统。该微影系统系由一光学表面、一与光学表面一部份接触的浸没流体、以及一具有一光感材料层形成于其上表面之半导体结构所构成,其中该光阻层之部分表面与该浸没流体接触,且该光感材料层之厚度系不大于5000。此外,本发明亦揭露一对具有一厚度不大于5000光感材料层形成于其上表面之半导体结构照光的方法,而该法系包括以下步骤:首先,在一光学元件及一光感材料层之间所构成之空间注入一浸没流体,接着照射一光线直接穿过该浸没流体至该光感材料层上,其中该光线之波长较佳系小于450奈米。
申请公布号
TW200515479
申请公布日期
2005.05.01
申请号
TW093123894
申请日期
2004.08.10
申请人
台湾积体电路制造股份有限公司
发明人
杨育佳;胡正明
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
洪澄文;颜锦顺
主权项
地址
新竹市新竹科学工业园区力行六路8号
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