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发明名称
Method for manufacturing self-aligned BiCMOS
摘要
申请公布号
KR100486304(B1)
申请公布日期
2005.04.29
申请号
KR20030007870
申请日期
2003.02.07
申请人
发明人
分类号
H01L21/331;H01L27/04;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/06;H01L29/737;(IPC1-7):H01L27/04
主分类号
H01L21/331
代理机构
代理人
主权项
地址
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