| 发明名称 |
SELF-ALIGNED MULTI-LAYER METAL FILM ELECTRO-LENS OF A MICRO-COLUMN ELECTRON BEAM APPARATUS AND METHOD FOR FABRICATING SAME |
| 摘要 |
Provided is an electron beam lens for a micro-column electron beam apparatus and a method of manufacturing the same. A photosensitive glass substrate is used as a base isolation substrate and a thin metal film is grown by a plating method. Holes through which electron beam passes are formed by a lift off method after forming a resist pattern shaped as a hole on a seed metal layer and plating the thin metal film. |
| 申请公布号 |
KR20050039458(A) |
申请公布日期 |
2005.04.29 |
| 申请号 |
KR20030074927 |
申请日期 |
2003.10.25 |
| 申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
CHOI, SANG KUK;KIM, DAE YONG |
| 分类号 |
G02B3/00;H01J1/02;H01J3/18;H01J9/02;H01J9/14;H01J37/12;(IPC1-7):G02B3/00 |
主分类号 |
G02B3/00 |
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