| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus of manufacturing a substrate for a transparent electrode capable of forming a transparent conductive film with small thickness distribution stably. SOLUTION: The apparatus of manufacturing a substrate for a transparent electrode 100 forms a substrate for a transparent electrode 110 composed of a transparent conductive film 112 formed on the film coated surface 111a of a base material 111 by a spray thermal decomposition method. The apparatus comprises a nozzle 130 for spraying a solution for the transparent conductive film 112, and a supporting device 120 which is placed on an opposite position against the nozzle 130 to carry the base material 111 so that a plurality of the nozzles 130 (130a to 130d) are prepared per base material 111. It is preferable, for example, that the nozzles 130 are attached to a linearly movable device 140. COPYRIGHT: (C)2005,JPO&NCIPI
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