| 摘要 |
PROBLEM TO BE SOLVED: To provide a film structure analyzing method constituted so as to analyze the structure of a film structure comprising a single-layer film or a multilayered film and analyzing a plurality of measuring data, which is obtained by measuring the same film sample under a measuring condition different in at least either one of resolving power and a dynamic range, at the same time to determinate the film structure. SOLUTION: In analyzing the film structure by fitting simulation operated data to measured data obtained by measuring X-ray reflectivity, a film structure analyzing result is obtained with high precision by preventing the analyzing result by fitting from falling into a local solution. COPYRIGHT: (C)2005,JPO&NCIPI
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