| 摘要 |
PROBLEM TO BE SOLVED: To uniformize in-plane distribution of sharpness caused by a film thickness distribution of a phosphor layer, and to prevent lamination deficiency between a scintillator and a photodetector. SOLUTION: In this radiation detection device, constituted of the scintillator 11 wherein the phosphor layer 7 for converting a radiation into light is supported on a support substrate 9, and the photodetector 5, comprising a plurality of photoelectric conversion elements 2 for converting light into an electrical signal, the surface in contact with the phosphor layer 7 of the substrate 9 for supporting the phosphor layer 7 is a recessed surface. The recessed shape of the substrate 9, whose bottom part coincide approximately with the center part of the substrate 9 is a shape compensating the film thickness distribution of the phosphor layer 7, and the phosphor layer comprises an aggregate of fine columnar crystals of CsI. COPYRIGHT: (C)2005,JPO&NCIPI
|
