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发明名称
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
摘要
申请公布号
SG110195(A1)
申请公布日期
2005.04.28
申请号
SG20040005761
申请日期
2004.09.16
申请人
ASML NETHERLANDS B.V.
发明人
BUTLER, HANS
分类号
G03F7/20;G05D3/12;H01L21/027
主分类号
G03F7/20
代理机构
代理人
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