| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator which has simple device constitution, is easy to control, and has excellent reproducibility. <P>SOLUTION: The plasma generator 100 is equipped with a couple of electrodes 42 and 43 which are arranged in a chamber 40, and a high-frequency power unit 11 which applies high-frequency electric power between the couple of electrodes 42 and 43. Further, the generator is equipped with a voltage/phase difference detecting device 41 which detects peak amplitude of the voltage applied across the electrodes 42 and 43, and the phase difference between a peak amplitude value of the voltage applied between the electrodes 42 and 43 and a current flowing between the electrodes 42 and 43; a voltage controller 12 which performs feedback control over the output voltage of the high-frequency power unit 11, so that the peak amplitude value of the voltage measured by the voltage/phase difference detecting device 41 reaches a set peak amplitude value; and a phase controller 30 which performs control so that the phase difference measured by the voltage/phase difference detecting device 41 reaches a specified phase difference set value. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
