| 摘要 |
PROBLEM TO BE SOLVED: To obtain an evaluation value on nonuniformity with high accuracy, by precisely recognizing unevenness areas as to a measuring object, such as a shadow mask and a color filter whose optical characteristics should be uniform. SOLUTION: Image data obtained by imaging the measuring object are inputted as image data to conduct a filtering process for emphasizing the unevenness areas. The mode value Hf is found on luminance values of respective pixels. Areas U1 of pixels with luminance values, smaller than the mode value Hf and areas U2 of pixels with luminance values larger than the mode value Hf, are defined as the unevenness areas. The sum total is found for the differences between luminance values on the respective pixels in the unevenness areas U1 and U2 and the mode value Hf. A value, found by dividing the sum total by the total number of pixels constituting the image data, is calculated as the evaluation value M expressing the degree of unevenness. Product inspection is performed by rating, as defective, those products whose evaluation values exceed a prescribed allowance and products whose mode values Hf deviate from a prescribed reference mode value by a large amount. COPYRIGHT: (C)2005,JPO&NCIPI |
