| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporation apparatus by which a uniform vapor deposition can be performed with ease of work. SOLUTION: The apex of a pipe-like cartridge 10 is provided with a nozzle 10c and the surroundings of the cartridge 10 exclusive of the certain portion of the nozzle 10c are covered by a heater 12. Both ends of the heater 12 are fixed by supports 14 and are fixed via the supports 14 to a base 10. The nozzle 10c of the cartridge 10 is less liable to deform by heating and since the interior thereof can be made hermetic, the uniform vapor deposition can be performed. Also, the filling of evaporation material M is made easy as well by pulling the cartridge 10 from the interior of the heater 12. COPYRIGHT: (C)2005,JPO&NCIPI
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