SURFACE TREATMENT METHOD FOR ALUMINUM

摘要

PROBLEM TO BE SOLVED: To provide a method of efficiently forming an oxide film on the surface of aluminum or an aluminum alloy. SOLUTION: The method of forming an oxide film on the surface of aluminum or an aluminum alloy with gaseous ozone is characterized in that the surface of aluminum or an aluminum alloy held from ordinary temperature to 450°C is brought into contact with an ozone-containing gas having an ozone concentration of 5 to 100 vol% to form an oxide film. In the case of a CVD (Chemical Vapor Deposition) system, the ozone-containing gas is fed in a state where the inside of the system is decompressed and heated, by which the oxide film is formed on the surface of the aluminum or aluminum alloy in the system. The concentration of the gaseous ozone is preferably controlled to≥20%. COPYRIGHT: (C)2005,JPO&NCIPI