| 摘要 |
PROBLEM TO BE SOLVED: To always perform inspection efficiently in the necessary minimum time by removing a loss of an inspection time, when executing simultaneously a plurality of inspection programs in the inspection to the same inspection object equipment. SOLUTION: A CPU 10 determines the quality of inspection parts 16-1 to 16-n, by simultaneously executing the plurality of inspection programs in an ROM 14. In this case, if the occurrence of failure determination in one inspection program among the inspection programs undergoing execution is detected, the CPU 10 finishes the inspection program and finishes execution of all the residual inspection programs under execution, to thereby always efficiently perform the inspection in the necessary minimum time, by removing the loss of the inspection time. COPYRIGHT: (C)2005,JPO&NCIPI
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